Question

In MOSFET fabrication, the channel length is defined during the process of

• A. Isolation oxide growth
• B. Channel stop implantation
• C. Poly-silicon gate patterning
• D. Lithography step leading to the contact pads

Hint:

In MOSFET fabrication, the patterning of the poly-silicon gate defines the channel length, which affects the device's electrical characteristics.

Answer 1

The Correct Option is C

In MOSFET fabrication, the channel length is defined during the **poly-silicon gate patterning** process. During this step, the gate electrode is patterned onto the semiconductor surface, and this defines the length of the channel between the source and drain regions. The precise definition of the channel length is crucial for the transistor's performance.
Thus, the correct answer is option (3).