Question

The process of transferring growth species from a source or target and depositing them on a substrate to form a film is called:

• A. Molecular Beam Epitaxy
• B. Physical Vapor Deposition
• C. Chemical Vapor Deposition
• D. Atomic Layer Deposition

Hint:

Atomic Layer Deposition is a precise technique used to grow thin films one atomic layer at a time, making it ideal for applications requiring uniform coatings.

Answer 1

The Correct Option is D

Step 1: Understand the question.
The process described refers to a thin film deposition technique where growth species are deposited in a controlled manner, one atomic layer at a time. This process is known as Atomic Layer Deposition (ALD).
Final Answer: \[ \boxed{\text{The correct answer is (4) Atomic Layer Deposition.}} \]