The gauge factor of a strain gauge is defined as the ratio of relative change in electrical resistance to the mechanical strain.
For semiconductor strain gauges, the gauge factor is significantly higher than for metallic strain gauges due to the piezoresistive effect. This effect refers to the change in resistivity of semiconductor materials when subjected to mechanical strain.
On the other hand, temperature effect and zener breakdown do not directly contribute to the high gauge factor in semiconductor strain gauges. Additionally, while small size is a characteristic of semiconductor gauges, it does not directly affect the gauge factor.